LayTec – integrated metrology for advanced processes

Benefits of integrated metrology

  • Quick identification of process deviations
  • Optimization of thin-film quality
  • Enhancement of production efficiency and yield
  • Fast transfer of established processes
  • Fast track to new materials and processes


  • EpiTT VCSEL – shipments to leading VCSEL manufacturer
  • ILMetro – in-line metrology station for CdTe based thin-film PV