LayTec – 様々なプロセスに対応したその場測定装置です。

Benefits of integrated metrology

  • Quick identification of process deviations
  • Optimization of thin-film quality
  • Enhancement of production efficiency and yield
  • Fast transfer of established processes
  • Fast track to new materials and processes


  • Major laser supplier chooses EpiTT FaceT for yield improvement
  • ILMetro – in-line metrology station for CdTe based thin-film PV