Due to their superior material properties, compound semiconductors have begun to replace classic silicon technology as the basic technology for more and more device types. A fundamental building block for the functionality of compound semiconductor devices is their layer stack. As technological development progresses, these layer stacks become more complex, the number of layers increases, the individual layers become thinner and their specifications tighter.
These developments have a direct impact on the requirements for optical measurement technology.
Our approach to these challenges is the "Connected Metrology" concept:
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