整合式量測技術:產品總覽

LayTec 是多種製程與研發應用的整合式量測技術領導廠商:磊晶半導體成長(MOVPE、MBE)、薄膜沉積(PECVD、ALD、濺鍍)與其他製程。我們的模組化技術平台,針對您的特定需求提供最佳的量測解決方案:

即時量測系統透過一個或多個觀察窗連接沉積系統,並即時觀察整個沉積製程中薄膜的形成。 ... more

 

線上量測系統與生產線整合,以在沉積腔室之間進行基板轉移時,能全面性地控制製程。   ... more

 

LayTec's lab-line tools are used in labs or in at-line production for quality assessment, testing and certification, in particular by PV module manufacturers. ...more

 

LayTec's map-line metrology is used for advanced mapping before and after processing. Currently, we offer mapping stations for transparent conductive films as well as mapping tools for pre- and post-epitaxy wafer characterization.  ... more

 

We develop OEM metrology solutions together with thin-film equipment manufacturers to guarantee the best metrology performance, full integration and compatibility with the equipment as well as an extensive technical support. … more