ILMetro stations combine up to five LayTec in-line metrology systems for a comprehensive control of industrial thin-film production processes by non-contact measurements. Each station can be customized to specific requirements and hence usually comprises a different combination of metrology systems.
ILMetro R2R combines reflectance, transmittance and Eddy-current measurements for determining properties such as reflectivity, transmission layer thickness and sheet resistance. Additionally, ILMetro R2R is controlling the winding motion enabling fully automated mapping measurements of entire rolls of foil on the km-scale. Alternatively the system can also be integrated into further R2R configurations for measurements on the moving foil. For R&D or additional quality assurance purposes the system also comprises a separate compartment for hand-loaded small-scale samples. With this new product, LayTec successfully enters the market for automated inspection and mapping systems for R2R foil processing.