Pyro 400:直接取得氮化鎵和碳化矽溫度

今日以氮化鎵為基礎的 LED 製程無法在磊晶於藍寶石或碳化矽基板成長時量測和控制實際的氮化鎵表面溫度。LayTec Pyro 400 提供精準的藍寶石和碳化矽基板中氮化鎵的表面溫度,以直接控制氮化銦鎵多量子井層的成長。

LayTec's latest development Pyro 400 Gen3 comes to the market with its own calibration tool: AbsouT 400. ...more

 

Pyro 400 搭配 EpiCurve® TT 提供您所有即時成長參數,更佳地控制 MOCVD 中 LED 的成長。具備 Pyro 400 第二代的所有功能,並為三元組成的應變工程和即時校正加上曲率量測。   關於 EpiCurve® TT 的更多資訊...

 

所有 LayTec 即時系統皆具備 LayTec 專門為製程最佳化、分析和控制所開發的軟體。我們的軟體解決方案可以在 MOCVD 晶圓廠控制多個系統,同時監控所有批次運行,並在依據先進製程控制(Advanced Process Control,APC)支援作業員決定”停線與否”。   ... 更多

 

Product information

Fields of application:

• GaN LED and laser diode production
• III-Nitride growth on sapphire
• SiC growth
• R&D for new materials and devices
and many others


Product features:

  • Ultraviolet (UV) pyrometry for direct GaN surface temperature control
  • Strict LED emission wavelength uniformity control
  • Automated correction of viewport coating effects to enable long-lasting, 24/7 accuracy in HB-LED emission wavelength
  • Additional infrared (IR) pyrometry for pocket temperature
  • Full performance up to 1500 rpm main susceptor rotation


Product news:


Downloads:

In-situ product portfolio