Pyro 400:  GaN 및 SiC 직접온도 측정

오늘날 GaN-based LED 생산에서 부상되는 문제는 sapphire 나 SiC상에서 에피성장하는 GaN의 표면온도를 측정하거나 제어할 수 없는 문제이다. LayTec은 sapphire 나 SiC상에서 에피성장하는 GaN의 표면온도를 정밀하게 직접 측정하는 Pyro400으로 , InGaN MQW층의 직접제어가 가능하게 한다.

LayTec's latest development Pyro 400 Gen3 comes to the market with its own calibration tool: AbsouT 400. ...more

 

The combination of Pyro 400 and EpiCurve® TT provides you with all real-time growth parameters and the best control of LED growth in MOCVD.    ... more about EpiCurve® TT

 

All LayTec in-situ systems are equipped with LayTec software specially developed for process optimization, analysis and control. Our software solutions can be integrated into the whole fab to monitor all runs simultaneously and support operators making “stop or go” decisions. ... more

 

Product information

Fields of application:

• GaN LED and laser diode production
• III-Nitride growth on sapphire
• SiC growth
• R&D for new materials and devices
and many others


Product features:

  • Ultraviolet (UV) pyrometry for direct GaN surface temperature control
  • Strict LED emission wavelength uniformity control
  • Automated correction of viewport coating effects to enable long-lasting, 24/7 accuracy in HB-LED emission wavelength
  • Additional infrared (IR) pyrometry for pocket temperature
  • Full performance up to 1500 rpm main susceptor rotation


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In-situ product portfolio