Time-resolved PL (TRPL) is another PL-based metrology method which has become increasingly important in recent years in the field of thin film photovoltaics. In contrast to sPL, the decay time of the PL signal is monitored in TRPL as a metric for carrier life time. Thus, it is a valuable technique for characterizing the electronic quality of a semiconductor.
In combination, both techniques can yield a very comprehensive characterization of thin film semiconductors and thereby advance both quality control and process optimization.
Both method work even at room and moderately elevated temperatures and are hence suitable for in-line monitoring of layer properties in vacuum or ambient conditions.
PearL is an in-line sPL metrology system, which probes deposited layers typically in less than 0.1 s. It works contact-less and without damaging the sample, thus allowing a fast 100% monitoring in production lines. Learn more on the PearL product page.
Metrology methods: overview