LayTec’s 25th in-situ Seminar

Since 2001 LayTec has been offering its in-situ seminar as a traditional satellite workshop for our customers at one of the annual international conferences. This year, however, most international conferences have been cancelled or postponed due to the ongoing pandemic. We therefore invite you to our online seminar on October 5th, 2021. This will provide around the world the opportunity for lively exchange within the community about the latest progress in in-situ metrology of epitaxial VCSEL processes and wafer mapping applications to in-situ monitoring of wet-chemical perovskite formation.

Real-life and globally transmitted online event

Please save the date: October 5th, 2021


Time (CEST)


Session 1: Moderation by Dr. Christian Camus, LayTec AG

09:00 – 09:15  


Volker Blank, CEO, LayTec AG, Dr. Kolja Haberland, CTO, LayTec AG

09:15 – 10:15


Plenary tandem talk: Heiko Mettler, AIXTRON SE, Dr. Oliver Schulz, LayTec AG
Best practices from the field: How to enhance epitaxy process performance by in-situ data

10:15 – 10:45


Aileen O’Mahony, Oxford Instruments Plasma Technology , Oxford Instruments Plasma Technology
Achieving high AlGaN/GaN HEMT performance using next generation in-situ etch depth control and low damage etching

10:45 – 11:15


André Maaßdorf, Ferdinand-Braun-Institut, Sebastian Brückner, Ferdinand-Braun-Institut
Ex-situ and In-situ assisted MOVPE growth of VCSELs and edge-emitting lasers at FBH

11:15 – 11:45


Jaime Beltrán Fernández, LayTec AG
Update on LayTec’s EpiX wafer mapping metrology systems

 Lunch break


Session 2: Moderation by Dr. Oliver Schulz, LayTec AG

15:00 – 15:30


Jaime Beltrán Fernández, LayTec AG
Live-Demo on latest EpiNet features

15:30 – 16:00


Emerson Candido de Oliveira, Technische Universität Kaiserslautern
In-situ real-time dry-etch-depth monitoring with EpiRAS equipment with accuracies in the low nanometer range

16:00 – 16:30



Dr. Carolin Rehermann, Helmholtz-Zentrum Berlin/HySPRINT Innovation Lab   
In-situ Metrology of solution-based hybrid materials – Development, Challenges and

16:30 – 17:00


Michael Zimmer, Universität Stuttgart
In-situ metrology of red-emitting VCSELs

You can register now by sending an e-mail with your contact information (company name, name, e-mail address) to

We are looking forward to your participation!


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Every year LayTec invites its customers to in-situ seminars organized in conjunction with major international conferences. At these meetings our customers present their latest measurement results, share experience and give practical advice on how to use in-situ systems to the maximum of their capability. Don't miss the next seminar! Ask for further information.