Map-line metrology for thin films

LayTec’s mapping tools provide characterization of thin film surfaces before and after processing. Our map-line solutions complement our product portfolio of in-situ, in-line and lab-line metrology tools and makes it possible to equip our customers and OEM partners with all required metrology from one source.

Together with our partner SURAGUS we offer mapping stations for development and production of transparent conductive films. Our EddyCus® TF map Hybrid provides combined non-contact measurements of sheet resistance and optical transparency. …more

 

The mapping tool EPIX extends LayTec’s in-situ metrology to pre- and post-epitaxy wafer characterization for high yield High-Brightness LED (HB LED) manufacturing. …more