Key technologies

LayTec’s expertise lies not only in metrology. Our software and design engineers, physicists, chemists and process engineers combine expert knowledge on metrology with expert knowledge on process optimization. As a result, LayTec can always serve the industries and R&D communities with solutions drawing from a combination of several key technologies:

  • Advanced real-time metrology methods   ... more
  • Software tools for Advanced Process Control (APC), Fault Detection and Classification (FDC) and related root-cause analysis based on in-situ and in-line metrology data  ... more
  • Thin film analysis algorithms that correlate in-situ and in-line measured data with material science, final device parameters and process yield.