Flames - 功能層的量測系統

LayTec Flames 是一多頭光學量測系統,專門用於監測大面積製程的多層薄膜結構。它能在線上製程沉積後量測多點層厚、反射率和穿透率的均勻性,精確度解析高達至小於 1 nm。反射率和穿透率的均勻性典型應用於顯示產業、金屬塗佈(卷對卷)和玻璃塗層的功能層。Flames 適用於幾乎所有薄膜生產線。其無需接觸的光學特性,能靠近製程量測,並可以封閉迴路控制層沉積和蝕刻。有了 LayTec Flames,您可以在製程後依產線速度取得均勻度的資訊,該資訊係以完整的統計分析呈現。您可以運用品質臨界點和警示讓作業員快速反應。

Antireflective coatings on solar glass

In order to minimize efficiency losses due to reflection of sun light on the front glass of PV modules, high-end solar glass is often equipped with an antireflective coating. The coating is deposited as a liquid by spray-coating or by printing techniques. Thereafter it is dried and annealed in consecutive production steps. The properties of the coating must be optimized in a way that the minimum of the reflectance matches the spectral absorption and conversion efficiency of the solar cells. Hence, spectral reflectance measurements directly deliver the most relevant information to characterize the coating in the production line. Fig. 1 shows the reflectance of uncoated glass and of glass coated by two different ARCs.
Reflectance spectra of uncoated glass and of AR coated glass with reflection minima at 665 nm and 760 nm.
Fig. 1. Reflectance spectra of uncoated glass and of AR coated glass with reflection minima at 665 nm and 760 nm.

As the reflectance of an ARC on glass is very low (this is the very purpose of the ARC) and it is mostly deposited on rolled glass which is used in this field of application, in-line measurements are quite challenging. However, optimisation of the optical metrology system’s design allows measurements with a repetition rate of up to 100 Hz even under these conditions.

Download the poster "Optical in-line monitoring of deposited layers in large area coating lines" (presented at ICCG-11)

範例:量測顯示製程中的非晶矽層

       

 

 

 

 

 

 

應用:針對在八世代玻璃基板上,在系統內沉積後,,具有金屬接觸圖案的矽/氧化矽/氮化矽堆疊之高速擷取影像(on-the-fly)層厚度分析的線上量測反射率。

本系統不影響生產時間,且簡單地整合在產線上的輸送帶上。

量測是取五個軌跡樣本在五個量測頭進行。

每個面板的每個取樣取 100 個量測點。精細執行整個面板的均勻性控制並取得統計資料(最小值、最大值、平均值和百分比)。

 

1.2   TF-Display:非晶矽功能層

LayTec Flames 提供高精確度且即時的生產製程品質管控資訊。可交叉追蹤跨面板的厚度變異和隨時間的漂移。透過 100% 管控以提高面板改善平均清潔時間(MTTC)和產能良率。

                     

Fig. 1+2: a-Si thickness on two substrates A and B: in-line Flames is compared to ex-situ reference (Horiba)                                                                                                                                             

  • 由於折射率較小,易地參考橢偏儀判定的非晶矽層厚度比較厚。兩種測量都可以解決相同的厚度變化問題。Flames 的線上量測乃即時完成,覆蓋 100% 的基材,而需要數分鐘的易地參考法只能運用於幾 % 的基板。

堆疊 50nm 非晶矽 / 100nm 氧化矽 / 50nm 氮化矽

LayTec 提供準確度至奈米尺度的堆疊在線監控(此處:非晶矽、氮化矽、氧化矽)透過直接多層分析節省實驗室分析時間,掌握產品品質保證!此實例中,除以奈米以下準確度量測 45nm 非晶矽 / 100nm 氧化矽 / 50nm 氮化矽外,也對 SiNx 及SiOx 進行線上量測 

 

欲瞭解 Flames 如何最佳化您的製程,請聯繫 mail@laytec.de 或撥打 +49(0)30 89 00 55-0。