NEPtune is a multi-wavelength reflectometer especially designed for wet etching in BEOL processing.
Main application is the end point detection (EPD) of metal films (e.g. Copper, Titanium) for under bump metallization (UBM) and copper pillar integration processes.
NEPtune includes a real-time embedded controller, which makes it ideal for reliable 24 / 7 operation in control loops.
It can be interfaced to the wet etch tool’s computer using TCP / IP (other interfaces on request).
The system can be configured for different integration levels:
NEPtune’s modular platform allows to connect up to 3 metrology heads to a single controller, thus providing multiple measurement positions on the wafer.