ILMetro stations combine up to five LayTec in-line metrology systems for a comprehensive control of industrial thin-film production processes by non-contact measurements. Each station can be customized to specific requirements and hence usually comprises a different combination of metrology systems.
ILMetro ist an in-line metrology station.
Depending on the configuration, ILMetro enables monitoring key parameters of thin-film manufacturing processes such as:
Uniformity information across the production line is gained by providing multiple measurement heads.
The combined evaluation of various metrology techniques enables improved process control.
ILMetro is designed for 24 / 7 operation in industrial environments. ILMetro allows full integration into all types of industrial production lines (including conveyors, roll-to-roll, clean room and process chambers) through customization of:
ILMetro is used for incoming inspection, process control, QA, pass / fail tests and binning in industries producing glass, displays, photovoltaics, printed electronics carbon fibre and other products.