Thin film growth classification according to material classes:
1. Epitaxy-type processes - resulting in crystalline films ... more
2. Deposition-type processes - resulting in amorphous /polycrystalline films:
a) Vacuum deposition at low temperature - resulting in amorphous thin films
b) Vacuum deposition at high temperature on non-crystalline substrates - resulting in
polycrystalline thin films
c) Chemical Bath Deposition (CBD) ... more
Thin-film growth classification based on equipment configuration:
1. Single-chamber thin-film growth
2. Multi-chamber thin-film growth
a) on semiconductor wafers – cluster tools for maximum productivity
b) on large glass substrates with in-line transfer from chamber to chamber ... more
c) on thin metal or polymer foils – roll-to-roll processes ... more
Auxiliary and special processes:
1. Post-deposition thermal treatment (RTA): re-crystallization of amorphous layers
2. Encapsulation: protecting the films
3. Etching processes
LayTec offers a wide variety of metrology tools for all these kinds of pocesses. Find the best tool for your specific needs in our product portfolio