综合性测量:产品概况

雷泰公司可为广泛的生产工艺和研发应用提供综合性测量:外延半导体生长(金属有机物汽相外延(MOVPE)、分子束外延(MBE)),薄膜沉积(等离子体增强化学汽相沉积(PECVD)、原子层沉积(ALD)、溅射)等。我公司的模块化技术平台可以为您提供一流的测量解决方案:

原位测量系统
原位测量系统通过一个或多个视窗与沉积系统相连,可以实时观察整个薄膜沉积过程中的薄膜形成过程。 ... more

 

在线测量系统集成于生产线上,可对在沉积室之间转移的衬底进行综合性制程控制。....

 

LayTec's lab-line tools are used in labs or in at-line production for quality assessment, testing and certification, in particular by PV module manufacturers. ...more

 

LayTec's map-line metrology is used for advanced mapping before and after processing. Currently, we offer mapping stations for transparent conductive films as well as mapping tools for pre- and post-epitaxy wafer characterization.  ... more

 

We develop OEM metrology solutions together with thin-film equipment manufacturers to guarantee the best metrology performance, full integration and compatibility with the equipment as well as an extensive technical support. … more