In-line metrology 

In-line metrology means fast, automated, reliable and non-destructive measurements that are fully integrated into a production line for comprehensive process control. LayTec’s in-line metrology systems are applied in the photovoltaics, OLED/OPV, display, touch panel and glass coating industries. Typically, our in-line metrology applies multi-optical head configuration with extremely high data acquisition. These metrology systems are integrated into the transfer systems between the processing steps. Our gold standard is 100% monitoring coverage of the thin film devices with zero delay of the manufacturing process. We offer the following in-line metrology systems:

SolR®: Monitoring of the properties and thicknesses of all layers throughout thin-film solar cell manufacturing processes like transparent conducting oxide (TCO) and absorber and buffer layers. SolR® is used in thin-film solar cell production, in particular in CIGS, CdTe and a-Si-based production lines. ... more

 

X Link®: Evaluation of cross-linking degree of encapsulants like ethylene vinyl acetate (EVA) or polyolefins after lamination of solar modules. ... more

 

PearL: Monitoring of the quality of absorber layers in CIGS-based production lines: band gap, electronic defects and the related composition of materials, e.g. the Ga/Ga+In ratio and Cu content of CIGS solar cells. Monitoring of CdTe absorbers is also possible. ... more

 

EddyCUS® TF inline: Conductivity/sheet resistance analysis of all conductive thin films. ... more

 

Flames - Measurement system for functional layers ...more

 
 
 
 

In-line benefits

  • Monitoring and optimization of deposition processes
  • Identification of process deviations after each step
  • Fast and competent stop-or-go decisions
  • Defective products are not processed further 
  • In-line metrology increases knowledge
  • In-line tools save money