In-situ monitoring systems for process control
As its in-situ sensors proved indispensable for optimising material quality and obtaining run-to-run reproducibility in opto-electronic and electronic applications, LayTec quickly became the market leader in compound semiconductor monitoring instrumentation for epitaxial thin-film growth.
LayTec provides in-situ solutions for a variety of growth systems:
MOCVD | MBE | HVPE |
|---|---|---|
AIXTRON single wafer and Planetary® | Riber | vertical |