For oxide applications LayTec offers a double-wavelength reflectometer EpiTT and a spectroscopic reflectometer EpiR DA UV. Several systems are already in use in sputter and MBE systems for measurements of oxide thickness in the range between 3 nm and 300 µm.

EpiTT is available with two wavelengths optimized for the oxide type and the thickness range.

EpiR DA UV is based on a detector array and provides full spectroscopic measurement of the normalized and absolute reflectance. For oxides we recommend the EpiR configuration with ultraviolet spectroscopic range (UV wavelength: 300 nm–770 nm).

For further details see:

• EpiTT datasheet
• EpiR DA UV datasheet
• related application notes