LayTec solutions for oxide applications

LayTec is the major provider of in-situ monitoring equipment for the compound semiconductor industry. LayTec’s unique real-time technology provides access to all main parameters during the actual thin-film growth process.

Now LayTec is expanding the application of its sensors to new fields, one of which is growth of thin  dielectric and oxides on silicon.
LayTec metrology systems are used for:

  • high k materials
  • MRAM applications
  • ZnO applications
  • thin-film optical structures (HR coating, AR coating and other processes)

LayTec products for oxides >

Further reading >

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