Monitoring systems for MOCVD processes

LayTec’s uniquely flexible sensors are adaptable to virtually any MOCVD growth environment. We have special mounts for AIXTRON Planetary® 2400/2600G3 and 2800G4 systems, AIXTRON CCS® reactors and various custom  built  MOCVD systems.  Temperature, reflectance and bowing measurements allow you to create the ideal monitoring system for your specific application.

Find out more about integration and requirements of the growth systems in the product datasheets:

 

AIXTRON single wafer
and Planetary®

AIXTRON CCS®

homebuilt

EpiTT
EpiCurve®TT Two
EpiR DA IR TT
EpiR DA UV TT
EpiRAS®TT

EpiTT
EpiTwin TT
EpiCurve®TT for CCS®
EpiCurve®TT HR
EpiCurve®Twin TT
EpiCurve®R TT
EpiR DA IR TT
EpiR DA UV TT

EpiTT
EpiCurve®TT Two
EpiR DA IR TT
EpiR DA UV TT
EpiRAS®TT

To find a solution for your material system, please have a look at the product overview >

Find more about your specific application in the related application notes >

 

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