For HVPE application LayTec’s EpiTT sensor provides growth monitoring at three wavelengths. It controls:

• surface roughness
• growth rate determination of the first 10 µm
• reflectance and pyrometry at 950 nm

EpiR DA UV TT sensor provides all features of the EpiTT and additionally full spectroscopic measurement of the normalized and absolute reflectance.

Find more about integration and requirements of the growth systems in the product datasheets:

EpiTT datasheet
EpiR DA UV TT datasheet

To find a solution for your material system, please have a look at the product overview >

Find more about your specific application in the related application notes >