EPIX extends LayTec’s in-situ metrology to pre- and post-epitaxy wafer characterization for high yield High-Brightness LED (HBLED) manufacturing. EPIX is a rapid scanning system that uses proprietary hardware and software to simultaneously measure the uniformity of the surface pattern and the curvature of a patterned sapphire substrate (PSS).
- Pre-epitaxy EPIX enables the operator to determine, with confidence, the suitability of a PSS for epitaxy, thereby directly enhancing the yield of the MOCVD process stage.
- Post-epitaxy it maps the surface bow of the finished HBLED epi-wafer providing QA/QC prior to HBLED device fabrication.
- Cooperative use of EPIX with other LayTec's in-situ metrology in combination with our EpiNet/EpiGuard® software opens a unique pathway to maximum HBLED epi yield.