EPIX: pre- and post-epitaxy wafer mapping for HB LEDs

metrology to pre- and post-epitaxy wafer characterizationEPIX extends LayTec’s in-situ metrology to pre- and post-epitaxy wafer characterization for high yield High-Brightness LED (HBLED) manufacturing. EPIX is a rapid scanning system that uses proprietary hardware and software to simultaneously measure the uniformity of the surface pattern and the curvature of a patterned sapphire substrate (PSS).

Benefits

  • Pre-epitaxy EPIX enables the operator to determine, with confidence, the suitability of a PSS for epitaxy, thereby directly enhancing the yield of the MOCVD process stage.
  • Post-epitaxy it maps the surface bow of the finished HBLED epi-wafer providing QA/QC prior to HBLED device fabrication.
  • Cooperative use of EPIX with other LayTec's in-situ metrology in combination with our EpiNet/EpiGuard® software opens a unique pathway to maximum HBLED epi yield.

 

Product information

Fields of application

  • Quality Assurance/Quality Control (QA/QC) metrology tool for PSS wafer assessment for HBLED manufacturers and PSS-wafer suppliers
  • Suitable for silicon, sapphire, PSS or any III-V substrate

 

Product features

  • Full wafer curvature and reflectance map
  • EPIX scans a 100 mm wafer in 1 minute, with the data displayed as full wafer maps with statistical information.
  • EPIX can share data with the EpiNet/EpiGuard data hub of LayTec’s in-situ metrology.