Publications concerning real-time monitoring of epitaxial growth

When real-time sensors are used for simply fingerprinting specific epitaxial device growth processes, a basic understanding of the underlying physics (solid-state physics, surface science, physics of thin-films and interfaces) is usually not necessary. However, for R&D applications and detailed process failure analysis a more detailed insight into the processes generating the sensor signals is needed. To assist you in your further reading we have compiled a list of publications.

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