LayTec in-situ sensors are the most advanced available on the market today. Our systems cover a complete range of thin-film applications, providing access to all significant parameters during deposition.

	growth rate	wafer bowing	composition of ternary material	true surface temperature ±1 K	doping concentration	reproducibility of device structures	typical material system
EpiTT EpiTwin TT EpiTriple TT	•			•		multi transient	III-As, P III-N
EpiCurve®TT EpiCurve®TwinTT EpiCurve®TT AR	•	•	•	•		multi transient	III-As, P III-N
EpiR TT	•		•	•		fully spectroscopic	III-As, P III-N
EpiCurve®R TT	•	•	•	•		fully spectroscopic	III-As, P III-N
EpiRAS®TT	•		•	•	•	fully spectroscopic	III-As, P
Pyro 400*	•			•		multi transient	GaN/SiC GaN/Sapphire
AbsoluT**				•

* Pyro 400 is offered in combination with EpiTT and provides access to the true wafer surface temperature of GaN specifically for infra-red transparent substrates (Sapphire, SiC) where the infra-red pyrometry measures the substrate surface temperature only.

** AbsoluT is a special tool for on-site calibration of LayTec's EpiTT, EpiTwin TT and EpiCurve^®TT systems