EpiR DA is an in-situ sensor for full spectroscopic thin-film growth monitoring. Based on a detector array, it provides full spectroscopic measurement of the normalized and absolute reflectance. The EpiR is available in two different spectroscopic ranges:

• EpiR DA IR is the configuration with infrared (IR: wavelength 500 nm ... 1000 nm) spectroscopic range for InP and GaAs applications.
• EpiR DA UV is the configuration with ultraviolet (UV: wavelength: 300 nm ... 770 nm) spectroscopic range for GaN and oxide applications.  The True Temperature (TT) module for emissivity-corrected temperature can be additionally integrated on request (EpiR TT).

EpiR provides uncompromising analytical sophistication and unmatched insight into epiwafer growth progress.

For further details see:

• EpiR datasheets
• related application notes