LayTec offers the ultimate temperature calibration tools for its in-situ metrology systems: AbsoluT (for EpiTT/EpiCurve®TT) and Absolut 400 (for Pyro 400). These small handheld devices provide a reference intensity that equals a known pre-calibrated temperature (around 900°C for EpiTT/EpiCurve®TT and 950-1000°C for Pyro 400), which is used for temperature calibration through the original viewport with unrivaled accuracy (ring-to-ring, reactor-to-reactor and run-to-run calibration). It can be applied directly in the MOCVD chamber without any modification of the in-situ tool or MOCVD equipment.
AbsoluT and AbsoluT 400 correct all temperature variations caused by adjustment, window coating or manufacturing tolerances of the equipment, such as viewport diameters. Furthermore, these easy-to-use calibration tools significantly reduce downtime and maintenance cycles.
LayTec’s patented AbsoluT technology currently keeps wafers at the absolute temperature scale of the National Metrology Institute of Germany (German name: Physikalisch-Technische Bundesanstalt - PTB). With this convenient handheld device, the user can quickly set up exactly the same absolute temperature reference point for pyrometry measurements on different rings and in different reactors and runs. With AbsoluT, ring-to-ring, reactor-to-reactor and run-to-run calibration can be done quickly and directly on-site.###NOHIDE###
For GaN epitaxy on sapphire and SiC, only UV pyrometry can sense the wafer temperature. Therefore, our latest development Pyro 400 Gen3 comes to the market with a brand-new calibration tool: AbsoluT 400. ...more
LayTec offers recalibration services for both AbsoluT 950 and AbsoluT 400. Recalibration is recommended every 12 month for keeping the calibration tools within ±0.5 K to the temperature scale of the National Metrology Institute of Germany (PTB). Recalibration on customer site is possible and takes just a few minutes. Alternatively, customers can ship-in their AbsoluT units to LayTec for recalibration. For more information please contact email@example.com.###NOHIDE###