LayTec offers the ultimate temperature calibration tool for its EpiTT, EpiTwinTT and EpiCurve® TT tools: AbsoluT. It provides a reference intensity that equals a known pre-calibrated temperature around 900°C which is used for temperature calibration through the original viewport with unrivaled accuracy. It can be applied directly in the MOCVD chamber without any modification of the in-situ tool or MOCVD equipment.
AbsoluT helps to correct all reactor-to-reactor and ring-to-ring temperature variations caused by adjustment, window coating or manufacturing tolerances of the equipment, such as viewport diameters.
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