Frequently asked questions: Synchronization
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What kind of synchronizing pulses are needed in a multi-wafer reactor?
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A trigger pulse one pulse per revolution is necessary.
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How do I synchronize the measured data with the process?
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LayTec offers communication channels (analog, digital, TCP/IP) for most growth systems to import "marker" signal for marking e.g. begin and end of each layer growth and start/stop measurement for remote data acquiring from the recipe that will be saved together with the data for synchronization.
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Which MOCVD control software can be connected to LayTec insitu tools?
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Epitor, CACE 3.5 and newer and Aixact via TCP/IP connection
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Can growth rate calculation be automized?
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Yes, with a TCP/IP connection the growthrate calculation can be initialized remote controlled by the growth system software. The specifics are defined in recipe type based profiles. The result are presented in a text report file. This can be macro-based exported (prepared by customer) to the customer own database.